quarter  

SOURCES

SYSTEMS

BEAM HANDLING

PROCESS KNOWLEDGE

LOGISTICS

FEASIBILITY

 

 

 

 
Excimer Experts

Processing using complex motifs

Simple mask

Parallel patterning

  • Generally suitable for big lasers
  • The feature is the mask motif, good for mass production but not flexible
  • Stencil-type masks - limited to simply-connected motifs
  • Metal/quartz masks – any feature is possible but with lower damage threshold